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Laser patterning

Laser patterning process is a dry process that forms circuit or element patterns necessary as a device.
By irradiating laser beam, variety of coated functional thin film on glass or plastic film substrates are removed selectively.

Compared to photo-etching

Less number of process steps. Less capital-investment spending.
Photo mask is unnecessary. Easy pattern change is possible by inputting data.
Dry process without developer and corrosive liquid.

Therefore running cost and environmental load can be reduced.

Compared to screen printing

Capable of <50μm microscopic pattern.
Unnecessary to change mask depending on patterns

 

Compared to ink-jet printing

Applicable to ink-unfitted materials.
Forming thin-film pattern of <100nm is possible.

  • モバイルタッチパネル Mobile / Touch Screen ・Transparent conductive film (Patterning)
    ・Extraction electrodes on touch screen (Patterning)
  • 有機ELディスプレイ Organic light emitting display (OLED)・Transparent conductive film (Patterning)
    ・Function membrane (Trimming)
  • Automobile Automobile・Transparent conductive film (Patterning)
    ・Extraction electrodes (Patterning)
    ・Parts surface treatment and marking
  • Degital Appliances Degital Appliances・Micro drilling
    ・Marking
  • 半導体・太陽電池 Semiconductor / Solar cell
    ・Scribing thin film
    ・Marking

The system has been widely used for especially electrode formation of transparent films such as ITO, silver nanowire, CNT and silver paste(conductive paste electrode).

  • Patterning of ITO thin film on glass substrate
    Line width: 25μm
    ガラス基板上のITO薄膜のパターニング
  • Patterning of ITO thin film on film
    Line width: 30μm
    フィルム上のITO薄膜のパターニング
  • Patterning of silver paste on film
    Line width: 25μm
    フィルム上の銀ペーストのパターニング
Features

・Laser light source is selectable ranging from near-infrared wavelength to ultraviolet wavelength and it corresponds to various applications.
・Adjustable patterning by highspeed launch-power controll of laser light.
・Uniform processing by steady laser light scan speed.
・High-accuracy patterning combined degital galvano-scanner and driving stage.
・Offering 3types of systems ranging from R&D use to mass-produce use.

Product Guide

Roll to Roll Type Laser Patterning System
TLRPThis Laser patterning system corresponds to 500mm width of rolled film mainly for touch-screen use.

By setting work on a reeler enables consecutive processing.

High-accuracy and -speed patterning mechanism combined linear drive gantry-stage and degital galvano-scanner.

Wavelength is selectable depending on materials. Minimum processing width 10μm is possible with UV laser beam.
TLRPシリーズ
Batch Type Laser Patterning Equipment
Batch typed patterning system installed degital galvano-scanner and positioning stage with high-accuracy work.

Work size corresponds to up to 500mm*500mm. The device corresponds from production to trial manufacture in circuit forming of touch-screen displays or OEL devices.
TLSM-202
Laser Patterning Equipment for R&D and Preproduction
TLSM-101Compact and low cost laser patterning system specialized for R&D and preproduction.

Corresponds to glass substrates or film materials in size of up to 150mm*150mm.

The device has degital scannner and high-accuracy patterning is possible.
TLSM-101